表面電阻測試儀 Surface Resistance Tester

表面電阻測試儀 Surface Resistance Tester

2.1.1 參考標準：ANSI/ESD STM11.11-2022, ANSI/ESD STM11.12-2021, ANSI/ESD
STM11.13-2021,ESD TR53-01-22
2.1.2 技術要求 Technical requirements
2.1.2.1 電阻測試儀 Resistance Measurement Apparatus (Refer to ANSI/ESD STM11.11-
2021, ANSI/ESD STM11.12-2021, ANSI/ESD STM11.13-2021, ESD TR53-01-22)
儀表應能夠進行從 1.0E+03 ohms 到 1.0E+12 ohms 的測量。
儀表的電路電壓應為：1.0E+06 ohms 及以上的負載測量時電壓為 100 伏 (±5%)。
≥1.0E+04 歐姆到 < 1.0E+06 ohms 測量時電壓為 10 伏 (±5%)。對于 1.0E+03
ohms 到小于 1.0E+04 ohms 的測量，儀表應具有 10 伏 (±5%) 的開路或負載電壓。
The meter shall be capable of making measurements from 1.0E+03 ohms to
1.0E+12 ohms.
The meter shall have a circuit voltage of :
100 volts (±5%) while under load for measurements of 1.0E+06 ohms and above.
10 volt (±5%) while under load for measurements from ≥1.0E+04 ohms to less than
1.0E+06 ohms.
The meter shall hane an open circuit or under load voltage of 10 volt (±5%) for
measurements from 1.0E+03 ohms to less than 1.0E+04 ohms.
2.1.2.2 兩點間電極 Two-Point Probe (Refer to ANSI/ESD STM11.13-2021)
兩點間電阻測試探頭為特制探頭，參見圖 6。其主要特征要求為：兩柱狀電極直徑
為3.2mm ± 0.1mm，電極中心到中心的距離6.4mm，電極材料鍍金且存在在4.3mm±
0.1 mm 的行程內有 4.7 牛+/-10%的彈簧力。電極接觸端圓柱狀材料導電橡膠長
3.2mm ± 0.1mm，硬度 60+/-10（邵氏 A 級），其體積電阻小于 500 ohm-cm。
注：在金屬表面上已 10V 電壓測量時，兩個電極之間的電阻應小于 1.0E+03 歐姆。
The two-point probe consists of an insulated metal body with a PTFE insulator
inserted into each end. PTFE is used because of excellent dielectric properties.
One insulator holds test leads; the other holds receptacles that accept spring loaded pins.One receptacle is surrounded by a cylindrical insulator, which is
surrounded by a metal shield. The pins are gold-plated and have a spring force of
4.7 Newton + 10% at a travel of 4.3 mm± 0.1 mm. The pins tips are machined to
accept friction fitted 3.2 ± 0.1 mm diameter electrically conductive rubber
electrodes or conductive rubber boots. The rubber has a Shore-A durometer
hardness of 50-70 Electrode volume resistivity is < 500 ohm-cm. The electrodes
are spaced 6.4 mm centerto center.
NOTE: The resistance between two resistance measurement electrodes should be
verified to be less than 1.0E+03 ohms when measured at 10 volts on a metallic
surface.

2.1.2.3 圓柱形電極 Cylindrical Electrodes (Refer to ESD TR53-01-22)
圓柱形電極，重量為 2.27 kg±2.5%（5 磅±2.5%），直徑為 63.5 mm±5%（2.5 英寸
±5%），肖氏（IRHD）硬度介于 50 和 70 之間的導電材料。在金屬表面上測量時，
兩個電極之間的電阻應小于 1.0E+03 歐姆。
Cylindrical electrodes with a weight of 2.27 kg ± 2.5% (5 pounds ± 2.5%) and a
diameter of 63.5 mm ± 5% (2.5 inches ± 5%) having a contact of electrically
conductive material with a Shore-A (IRHD) durometer hardness between 50 and
70. The resistance between two electrodes should be less than 1.0E+03 ohms
when measured on a metallic surface.
2.1.2.4 儀表分辨率：數顯式，用于符合性驗證的設備要求小數點后 1 位。例如標準電阻為
1 兆歐，儀器應顯示為 1.0E+06 ohms.
Instrument resolution: digital display, Equipment used for compliance verification
requires 1 decimal place. For example, if the standard resistance is 1 megohm, the
instrument should display as 1.0E+06 Ohms.
2.1.2.5 儀表精度 Meter accuracy
精度為±10 %。
accuracy ± 10%.